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  • Surface and subsurface characterisation in micro-milling of monocrystalline silicon. 

    Huo, Dehong; Lin, Chao; Choong, Zi Jie; Pancholi, Ketan; Degenaar, Patrick (Springer https://doi.org/10.1007/s00170-015-7308-7, 2015-05-21)
    HUO, D., LIN, C., CHOONG, Z.J., PANCHOLI, K. and DEGENAAR, P. 2015. Surface and subsurface characterisation in micro-milling of monocrystalline silicon. International journal of advanced manufacturing technology [online], 81(5), pages 1319-1331. Available from: https://doi.org/10.1007/s00170-015-7308-7
    This paper presents an experimental investigation on surface and subsurface characterisation of micro-machined single-crystal silicon with (100) orientation. Full immersion slot milling was conducted using solid cubic boron ...